Magnetically preloaded aerostatic guideway for high speed nanometer positioning
نویسندگان
چکیده
منابع مشابه
Design and Nanometer Positioning of a Low Friction Pneumatic Cylinder Embedded with Aerostatic Bearings
In the paper, a low friction pneumatic cylinder and a sliding table, and both of them are embedded with aerostatic bearings are designed. A low friction pneumatic table is constructed by combining the pneumatic cylinder and the sliding table. The characteristics for the friction force versus velocity of the pneumatic cylinder and the pneumatic table are measured. Moreover, a hybrid self-tuning ...
متن کاملA High-Precision, Magnetically Levitated Positioning Stage
High accuracy positioning stages with multiple degrees-of-freedom, or microsteppers, are ubiquitous in industrial manufacturing. These devices are used in probing and inspection systems, in the assembly of disk drive heads, and in semiconductor manufacturing. In semiconductor manufacturing, microsteppers are employed to accurately move silicon wafers in the photolithography process. To guarante...
متن کاملNonimaging speckle interferometry for high-speed nanometer-scale position detection.
We experimentally demonstrate a nonimaging approach to displacement measurement for complex scattering materials. By spatially controlling the wavefront of the light that incidents on the material, we concentrate the scattered light in a focus on a designated position. This wavefront acts as a unique optical fingerprint that enables precise position detection of the illuminated material by simp...
متن کاملLinear motion carriage with aerostatic bearings preloaded by inclined iron core linear electric motor
A fundamentally precise and simple linear motion axis design is discussed where the attractive force from the linear motor is used to preload a carriage supported by six rigidly attached porous carbon air bearings. The air bearings are assembled by vacuuming the pads to two orthogonal planes, positioning the carriage above the pads, and then injecting epoxy between the bearings and the carriage...
متن کاملImaging high-speed friction at the nanometer scale
Friction is a complicated phenomenon involving nonlinear dynamics at different length and time scales. Understanding its microscopic origin requires methods for measuring force on nanometer-scale asperities sliding at velocities reaching centimetres per second. Despite enormous advances in experimental technique, this combination of small length scale and high velocity remain elusive. We presen...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Advanced Mechanical Design, Systems, and Manufacturing
سال: 2014
ISSN: 1881-3054
DOI: 10.1299/jamdsm.2014jamdsm0054